Electric Fused Quartz

 Introduction

Main application: Electric fused quartz materia has characteristios such as low OH content, high purity, and strong high-temperature resistance. It is widely used as quartz parts for diffusion process and CVD furnace in semiconductor industry.


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Fused Quartz Ingot

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Electric Fused Quartz Tube

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Electric Fused Quartz Rod

  

  Chemical purity


FLH620L  Impurity Typical Value  (ppm)

Al

13

B

<0.01

Ca

0.6

Zr

1

Cu

<0.01

Fe

0.5

K

0.4

Li

0.4

Mg

<0.05

Mn

<0.05

Na

0.6

Ni

<0.05

Ti

1.30

OH

<30


FLH621  Impurity Typical Value  (ppm)

Al

14.2

B

0.08

Ca

0.6

Zr

Cu

<0.01

Fe

0.23

K

0.25

Li

0.44

Mg

<0.05

Mn

<0.05

Na

0.12

Ni

<0.05

Ti

1.30

OH

≤15


FLH621H   Impurity Typical Value  (ppm)

Al

8.00

B

0.04

Ca

0.6

Zr

Cu

<0.01

Fe

0.15

K

0.15

Li

0.15

Mg

<0.05

Mn

<0.05

Na

0.08

Ni

<0.05

Ti

1.40

OH

≤15

  

  Physical Property

Mechanical Properties

Density(g/cm³)

Young’s Modulus(GPa)

Poisson’s Ration

Bending Strength(MPa)

Compressive Strength(MPa)

Tensile Strength(MPa)

Torsional Strength(MPa)

Mohs Hardness

2.2

75

0.17

65-95

1100

50

30

6-7

Electrical Properties

Dielectric Constant

Loss Factor

Resistivity(Ω.cm)

3.74

0.0001

1×1016

Thermal Properties

Strain Point(η=1014.5 ℃)

Annealing point(η=1013 ℃)

Softening point(η=107.8 ℃)

Thermal Conductivity(W/m·k)(20℃)

Specific Heat (J/kg.k) (20℃)

Expansion Coefficient( x10 -7 /k)
α : 20℃ ~ 320 ℃

1150

1215

1710

1.38

749

5.2-5.8

      Note: Unless otherwise specified, all values refer to temperatures below 25 ℃.       Other sizes available upon requests.


  

  Optical properties

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      。       Infrared Transmittance Curve.

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      。       Ultraviolet Transmittance Curve.

  Fused quartz material
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